Plasma Cleaner

 

Model: NEMST-2002

Category: Plasma Cleaning and Surface Treatment Machine

Exhibitor: NANO ELECTRONICS AND MICRO SYSTEM TECHNOLOGIES, INC.

Booth No: TBA

 

Characteristic

 

1. High density plasma source. 2. Two electrodes design. 3. The direction of ion mobility can be controlled. 4. Deep plasma penetration: uniform plasma penetration for 300mm. 5. Multiple processing gas selectivity. 6. Low gas flow rate.

 

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