Plasma Cleaner
Model: NEMST-2002
Category: Plasma Cleaning and Surface Treatment Machine
Exhibitor: NANO ELECTRONICS AND MICRO SYSTEM TECHNOLOGIES, INC.
Booth No: TBA
Characteristic
1. High density plasma source. 2. Two electrodes design. 3. The direction of ion mobility can be controlled. 4. Deep plasma penetration: uniform plasma penetration for 300mm. 5. Multiple processing gas selectivity. 6. Low gas flow rate.
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