In-Line Plasma Cleaner
Model: NEMST-2002IL
Category: Plasma Cleaning and Surface Treatment Machine
Exhibitor: NANO ELECTRONICS AND MICRO SYSTEM TECHNOLOGIES, INC.
Booth No: TBA
Characteristic
1. In-line plasma cleaning process. 2. Advanced flow pattern design. 3. High-speed plasma cleaning:28~33 seconds/cycle in general , including loading/unloading, plasma treatment. 4. Low temperature plasma cleaning. 5. Chamber capability:2~4 strips or 5~7 strips of substrates or lead-frames in one cycle.
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