Full Automatic Exposure System for High
Model: ADEX5300M series
Category: Exposure Machine
Exhibitor: Takewin International Co., Ltd.
Booth No: TBA
Characteristic
● Partial exposure: Selectable from global,division in 1,2,3,4 or 6 areas ●Imaging resolution: L / S-30 / 30um SRO = ψ50um ● Alignment accuracy: ± 3um
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EDM
