AOI&AOS solutions for most advanced IC substrate manufacturing
Exhibitor: KLA Taiwan
Date: 2021-12-17
Booth No.: N-1319
Ultra Dimension™ 900
-Ultra fine pattern inspection down to 5μm L/S and superior laser via
(LV) inspection accuracy & operational efficiency for IC substrate manufacturing.
Ultra PerFix™ 500
-For the most advanced IC substrates and fine line applictions down
to 5μm L/S
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