台積電南京12吋廠下半年裝設機台，18年下半進入量產
Date: 2017-03-28
News Type:
根據報導，台積電南京有限公司總經理羅鎮球日前在 ICMC 2017上表示，台積電 7 奈米製程預計2017年下半將為客戶 tape－out生產。此外，他還透露，現階段 EUV 最新曝光機台在台積電已經可以達到連續 3天，穩定處理超過1,500片12吋晶圓的狀態。根據時程，台積電南京廠預計 2017 下半年就要安裝生產機台，2018上半年試產，2018下半年正式投入量產。
報導中羅鎮球指出，台積電做為全球最大晶圓代工廠，將會持續推進摩爾定律。目前台積電 10 奈米製程已順利量產，2017年下半年7奈米製程也將正式 tape－out。而台積電所採用ASML最新EUV的型號為NXE3350 的曝光機台，光源已經可以提高到 125 瓦，同時已達到連續 3 天處理 1,500 片 12吋晶圓的水平。
目前位於南京浦口的工廠是台積電在中國的第一座 12吋晶圓廠。羅鎮球透露，台積電南京廠預計 2017 下半年就要安裝生產機台，並且於 2018 上半年試產， 2018 下半年正式投入量產。 （新聞來源：科技新報）
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