Linear Motor Air Bearing Stage

Model: Linear Motor Air Bearing Stage

Booth No: TBA

Characteristic

Linear Motor Air Bearing Stage is a non-contact transmission design, which can provide excellent speed stability and is suitable for industrial applications during transfer operations. Features include: low center of gravity platform design, which greatly improves the dynamic rigidity of the equipment. No need to replace the guide rail elements regularly and no need for grease to lubricate the guide rail, easy and fast maintenance. It can be used in wafer dicing, cosmetic and defect inspection, laser processing, scanning optical inspection, and coating applications.